Soft Magnetic Properties of Nanocrystalline Fe-M-(B and/or O)(M=Group IV A, V A Elements) Alloy Films

概要

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In Fe-M-(B and/or O)(M=group IV A, V A elements) alloy films, nanocrystalline bcc phase are formed by annealing the amorphous single phase for Fe-M-B films, whereas the bcc nanocrystals are already formed in an as-deposited state for Fe-M-O or Fe-M-B-O) films. Among Fe-M-B films with various M elements, Fe-(Zr, Hf, Nb, Ta)-B alloy films exhibit high saturation magnetization (Is) above 1.4 T and high relative permeability (|μ|) above 1000 at 1MHz. The highest |μ| of 3460 at 1MHz is obtained for Fe_<78.5>Nb_<8.3>B_<13.2> alloy film. On the other hand, Fe-(Hf, Zr)-O alloy films exhibit the flat frequency characteristics of μ' of approx. 1000 up to 100MHz owing to their considerably higher electrical resistivity (ρ) than that of Fe-M-B alloy films. Both the films consist of fine-grained bcc phase with diameter below 20 nm and an amorphous phase containing larger amount of M elements than that in the bcc phase. In Fe-Hf-B-O alloy films, the ρ values as high as the Fe-Hf-O alloy films are obtained in higher Fe content than the Fe-Hf-O films. As a result, Fe_<68.9>Hf_<10.2>B_<1.0>O_<19.9> film simultaneously exhibits the higher Is of 1.4T, higher μ' of 1310 at 100MHz, and lower saturation magnetostriction (λs) of 2.2×10^<-6> than those of Fe_<54.9>Hf_<11.0>O_<34.1> alloy film.soft magnetic filmsnanocrystalline bcc phaseamorphous phasehigh permeabilityhigh electrical resistivity
東北大学の論文
1996-03-28