Wavelength Tuning of GaAs/AlGaAs Quantum-Well Infrared Photo-detectors by Proton Implantation Induced Intermixing
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概要
- 論文の詳細を見る
Proton implantation induced intermixing was used to tune the quantum well infrared photo-detector(QWIP)response wavelength, which may provide a method of fabricating two-color QWIP devices.Obvious red shift of response wavelength as large as 0.6μm was observed relative to the reference sample that was annealed without implantation, from 7.7μm to 8.3μm.Two response wavelengths for the highest-dose implanted sample were observed in the photo-current spectra.In the highest dose case(5×10^15 H/cm^2), the dark current increased by an order of magnitude and peak responsivity decreased by a factor of 3 for the implanted and annealed sample.This has been attributed to the raising of the ground state energy level in the intermixed quantum well and residual damage in the implanted and annealed QWIPs.
- 社団法人応用物理学会の論文
- 2000-04-15
著者
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Lu W
Faculty Of Pharmaceutical Sciences Toyama Medical And Pharmaceutical University
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Lu Wei
中華人民共和国
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Shen S.C.
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics of Chinese Academy
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Jagadish C.
Department of Electronic Materials Engineering, Research School of Physical Science and Engineering,
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Jagadish C
Australian National Univ. Act Aus
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Jagadish C.
Department Of Electronic Material Engineering Research Shcool Of Physical And Engineering The Austra
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Lu W
Tf‐wmatm Nj Usa
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Shen S.c.
National Laboratory For Infrared Physics Shanghaiinstitute Of Technical Physics Chinese Academy Of S
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Shen S.c.
Laboratory For Infrared Physics Academia Sinica
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Shen S.c.
National Laboratory For Infrared Physics Shanghai Institute Of Technical Physics Of Chinese Academy
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LIU X.Q.
National Laboratory for Infrared Physics, ShanghaiInstitute of Technical Physics, Chinese Academy of
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LI N.
National Laboratory for Infrared Physics, ShanghaiInstitute of Technical Physics, Chinese Academy of
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LU W.
National Laboratory for Infrared Physics, ShanghaiInstitute of Technical Physics, Chinese Academy of
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TAN H.H.
Department of Electronic Material Engineering, Research shcool of Physical and Engineering, The Aust
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YUAN X.Z.
National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy o
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FU L.
Department of Electronic Materials Engineering, Research School of Physical Science and Engineering,
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Tan H.h.
Department Of Electronic Material Engineering Research Shcool Of Physical And Engineering The Austra
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Liu X.q.
National Laboratory For Infrared Physics Shanghaiinstitute Of Technical Physics Chinese Academy Of S
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Yuan X.z.
National Laboratory For Infrared Physics Shanghai Institute Of Technical Physics Chinese Academy Of
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Fu L.
Department Of Electronic Materials Engineering Research School Of Physical Science And Engineering T
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