Comparative Study of Hydrido Organo Siloxane Polymer and Hydrogen Silsesquioxane
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-10-15
著者
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Kim J
Changwon National Univ. Kyungnam Kor
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Park J
豊橋技科大
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Kim Sun-young
Memory R&d Division Hyundai Electronics Ind.co. Ltd.
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KIM Jun
Memory R&D Division, Hyundai Electronics Industries, Co., Ltd.
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Chung Sung-woong
Memory R&d Division Hyundai Electronics Ind.co. Ltd.
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Kim Jun
Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Kim Jong
Institute Of Basic Science Changwon National University
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Park Jinwon
Memory R&d Division Hyundai Electronics Ind.co. Ltd.
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Shin Joo-han
Memory R&d Division Hyundai Electronics Ind.co. Ltd.
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