The Effect of Ion Bombardment on Carbon Films Prepared by Laser Evaporation

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概要

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• Carbon films have been prepared by laser evaporation of powdered graphite simultaneously with Ar ion bombardment on a deposited substrate. The effect of the ion bombardment on film properties, composition and structure has been investigated. Films with higher transmittance, resistivity and hardness are obtained by simultaneous ion bombardment, and are supposed to present a random network structure.

• 社団法人応用物理学会の論文
• 1981-03-05

著者

• Fujimori Susumu

  Ibaraki Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation

• Nagai Kazutoshi

  Ibaraki Electrical Communication Laboratory

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