Spontaneous Hydrogenation of Ti Films Evaporated on NaCl Substrates II
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概要
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The growth and structure of Ti films evaporated on ultra-high-vacuum- and air-cleaved Nail substrates at room temperature have been studied by reflection high-energy electron diffraction. The 2 nm-thick film on the former showed bcc-and CaF_2-type (TiH_<1.5>) reflections while that on the latter showed TiH_<1.5> ones immediately after the evaporation. Judging from the lattice parameter (0.33 nm), the bcc crystallite was analyzed to be β-Ti. This is the first observation of β-Ti grown in evaporated Ti films. The β-Ti changed into TiH_<1.5> with time. This spontaneous hydrogenation mechanism of the evaporated Ti films is discussed.
- 社団法人応用物理学会の論文
- 1990-10-20
著者
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Kasukabe Yoshitaka
Department Of Materials Science And Enginnering Waseda University
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Yamada Yukio
Department Of Mechanical Engineering And Intelligent Systems University Of Electro-communications
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