Cubic Crystals in Ti Films Evaporated on NaCl Substrates
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概要
- 論文の詳細を見る
The growth and structure of Ti films evaporated on NaCl substrates have been studied by electron microscopy. The film showed cubic or fcc-like diffraction spots of three types in the early growth stage, depending on the preparation method and temperature of the substrate and film thickness. The lattice parameters corresponding to those spots taken from 2 nm-thick films formed on the substrate at 260℃ were a=0.441 nm, 0.418 nm and 0.426 nm, which were defermined to be those of CaF_2-type TiH_<1.5>, NaCl-type TiO_<1.0> and some titanium compound, respectively. The former two grew on the substrate cleaved in vacuum while the last one grew on that cleaved in air, only. When the film was thicker than 3 nm, hcp diffraction spots also appeared. The formation mechanism of the cubic and hcp crystallites is discussed.
- 社団法人応用物理学会の論文
- 1990-04-20
著者
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Yoshida Kazuhiko
Department of Medicine, Kidney Center, Tokyo Womens Medical University
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Kasukabe Yoshitaka
Department Of Physics College Of General Education Tohoku University
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Kasukabe Yoshitaka
Department Of Materials Science And Enginnering Waseda University
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Yamada Yukio
Department Of Mechanical Engineering And Intelligent Systems University Of Electro-communications
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Yamada Yukio
Department Of Physics College Of General Education Tohoku University
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Yamada Yukio
Department Of Biochemistry Chiba University School Of Medicine
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Yoshida Kazuhiko
Department Of Physics College Of General Education Tohoku University
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