Systematics of Electrical Conductivity across InP to GaAs Wafer-Fused Interfaces
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概要
- 論文の詳細を見る
We report on the electrical and compositional characterization of wafer-fused isotype heterojunctions between Zn-, C- or Si-doped GaAs and Zn- or Si-doped InP. The junctions were characterized by current-voltage and secondary ion mass spectrometry (SIMS) measurements. It is demonstrated that very low-resistive junctions can be obtained in each case, but also that there is a strong influence from the detailed sample structure and processing conditions. SIMS was used to monitor the doping concentration across the interface as well as the impurity concentrations of oxygen, carbon and iron.
- 社団法人応用物理学会の論文
- 1999-02-28
著者
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Bentell Jonas
Department Of Electronics Laboratory Of Semiconductor Materials Royal Institute Of Technology
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Rapp Stefan
Department Of Electronics Laboratory Of Semiconductor Materials Royal Institute Of Technology
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KEIPER Dietmar
Department of Electronics, Royal Institute of Technology (KTH)
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Keiper D
Royal Inst. Technol (kth) Kista Swe
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Hammar M
Royal Inst. Technol. (kth) Kista Swe
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Keiper Dietmar
Department Of Electronics Laboratory Of Semiconductor Materials Royal Institute Of Technology
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HAMMAR Mattias
Mitel Semiconductor AB
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WENNEKES Frank
Department of Electronics, Laboratory of Semiconductor Materials, Royal Institute of Technology
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SALOMONSSON Fredrik
Department of Electronics, Laboratory of Semiconductor Materials, Royal Institute of Technology
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STREUBEL Klaus
Mitel Semiconductor AB
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WESTPHALEN Ralf
Department of Electronics, Laboratory of Semiconductor Materials, Royal Institute of Technology
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Wennekes Frank
Department Of Electronics Laboratory Of Semiconductor Materials Royal Institute Of Technology
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Westphalen Ralf
Department Of Electronics Laboratory Of Semiconductor Materials Royal Institute Of Technology
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Salomonsson Fredrik
Department Of Electronics Laboratory Of Semiconductor Materials Royal Institute Of Technology
関連論文
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- Systematics of Electrical Conductivity across InP to GaAs Wafer-Fused Interfaces
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