Oxidation and Heat Treatment Effect on Crystal Structure and Electrical Conductivity of Ferroelectric Pb(Zr, Ti)O_3 Films
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概要
- 論文の詳細を見る
Ferroelectric PZT thin films were grown by metalorganic chemical Vapor deposition (MOCVD). The crystal structure and chemical composition ratio of synthesized PZT films were analyzed by X-Ray diffraction and fluorescence X-ray analysis. The lattice parameters of a typical PZT film were a=4.017 Å and c=4.177 Å, with tetragonality c/a =1.04. The chemical formula of an as-deposited film was estimated to be Pb_<0.98> (Zr_<0.39>,Ti_<0.61>)O_<2.98> from fluorescence X-ray analysis. Deposited films were annealed under 2 lg/cm^2 O_2 gas atmosphere for 1h at 700℃ in an electric furnace, and the electrical conductivity of annealed films was decreased. The dielectric constant was measured to be 480.
- 社団法人応用物理学会の論文
- 1996-09-30
著者
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Baba Akira
Department Of Cardiovascular Medicine Wakayama Medical University
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Masuda Yoichiro
Department Of Electrical And Electronics Engineering Graduate School Hachinohe Institute Of Technolo
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