Conversion of Diamond-Like Carbon Film from Phenylcarbyne Polymer under Pulsed Green Laser Irradiation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-03-15
著者
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Huang S
Data Storage Inst. Singapore
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LU Yong
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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Lu Yong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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HUANG Su
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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SUN Zhuo
School of Electrical and Electronic Engineering, Nanyang Technological University
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Sun Zhuo
School Of Electrical And Electronic Engineering Nanyang Technological University
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Huang Su
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
関連論文
- The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
- Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes
- Conversion of Diamond-Like Carbon Film from Phenylcarbyne Polymer under Pulsed Green Laser Irradiation
- The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
- Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes