Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-05-01
著者
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Low Teck
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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CHAN Daniel
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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LU Yong
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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LEE Yuan
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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ZHOU Mei
Chartered Semiconductor Manufacturing Ltd.
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Lu Yong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Lee Yuan
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Chan Daniel
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Lu Yong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
関連論文
- Wavelength Effects in the Laser Cleaning Process
- The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
- A Theoretical Model for Laser Cleaning of Microparticles in a Thin Liquid Layer
- Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes
- Conversion of Diamond-Like Carbon Film from Phenylcarbyne Polymer under Pulsed Green Laser Irradiation
- The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
- Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes