The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-06-01
著者
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Lu Y
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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LU Yong
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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YU Jian
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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CHOI Wee
Laser Microprocessing Laboratory, Department of Electrical Engineering and Data Storage Institute, N
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Lu Yong
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Yu Jian
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
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Choi W
National Univ. Singapore Singapore
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Choi Wee
Laser Microprocessing Laboratory Department Of Electrical Engineering And Data Storage Institute Nat
関連論文
- The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
- Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes
- Conversion of Diamond-Like Carbon Film from Phenylcarbyne Polymer under Pulsed Green Laser Irradiation
- The Excimer Laser-induced Ripple Structures at the Interfaces of Silicon-dioxide/Silicon Substrates
- Steam Laser Cleaning of Plasma-Etch-Induced Polymers from Via Holes