Ultrasonic Probe for Detecting a Three-Dimensional Vibration
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概要
- 論文の詳細を見る
We propose a contact ultrasonic probe which can detect a three-dimensional vibration and separate it into its X, Y and Z components. The performance is realized using two Lamb waves and a shear horizontal (SH) wave simultaneously. The vibration in the Y direction is detected using the zeroth-order symmetrical (S_0) mode SH wave, which has a displacement in only the Y direction. Those in the X and Z directions are detected using the zeroth-order asymmetrical (A_0) and S_0 mode Lamb waves, respectively. In a region in which the substrate is thinner than the wavelength, the A_0 mode Lamb wave has a displacement in only the X direction, and the S_0 mode, only in the Z direction.
- 社団法人応用物理学会の論文
- 1997-05-30
著者
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MIZUTANI Koichi
Institute of Engineering Mechanics and Systems, University of Tsukuba
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NAGAI Keinosuke
Institute of Engineering Mechanics and Systems, University of Tsukuba
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Wakatsuki Naoto
Department Of Electronics And Information Systems Akita Prefectural University
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Nagai Keinosuke
Institute Of Applied Physics University Of Tsukuba
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Mizutani Koichi
Institute Of Engineering Mechanics And Systems University Of Tsukuba
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WAKATSUKI Naoto
Institute of Applied Physics, University of Tsukuba Scietnce City
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Mizutani Koichi
Institute Of Applied Physics University Of Tsukuba
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