Fast Atom Beam Etching of Glass Materials with Contact and Non-Contact Masks
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-12-30
著者
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Yamauchi Kazuo
Ebara Research Co. Ltd.
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TOMA Yasushi
Ebara Research Co., Ltd.
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HATAKEYAMA Masahiro
Ebara Research Co., Ltd.
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ICHIKI Katsunori
Ebara Research Co., Ltd.
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HUANG Hailing
Ebara Research Co., Ltd.
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WATANABE Kenji
Ebara Research Co., Ltd.
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KATO Takao
Ebara Research Co., Ltd.
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Toma Yasushi
Ebara Research Co. Ltd.
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Huang Hailing
Ebara Research Co. Ltd.
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Hatakeyama Masahiro
Ebara Research Co. Ltd.
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Kato Takao
Ebara Research Co. Ltd.
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Ichiki Katsunori
Ebara Research Co. Ltd.
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Watanabe Kenji
Ebara Research Co. Ltd.
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Toma Yasushi
Ebara Corporation, Fujisawa, Kanagawa 251-8502, Japan
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