ICHIKI Katsunori | Ebara Research Co., Ltd.
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概要
関連著者
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ICHIKI Katsunori
Ebara Research Co., Ltd.
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Ichiki Katsunori
Ebara Research Co. Ltd.
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SAMUKAWA Seiji
Institute of Fluid Science, Tohoku University
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Samukawa Seiji
Institute Of Fluid Science Tohoku University
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Samukawa Seiji
Vlsi Development Div. Nec Corporation
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SAKAMOTO Keisuke
Institute of Fluid Science, Tohoku University
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Sakamoto Keisuke
Institute Of Fluid Science Tohoku University
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Yamauchi Kazuo
Ebara Research Co. Ltd.
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TOMA Yasushi
Ebara Research Co., Ltd.
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HATAKEYAMA Masahiro
Ebara Research Co., Ltd.
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HUANG Hailing
Ebara Research Co., Ltd.
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WATANABE Kenji
Ebara Research Co., Ltd.
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KATO Takao
Ebara Research Co., Ltd.
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Toma Yasushi
Ebara Research Co. Ltd.
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Huang Hailing
Ebara Research Co. Ltd.
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Hatakeyama Masahiro
Ebara Research Co. Ltd.
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Kato Takao
Ebara Research Co. Ltd.
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Watanabe Kenji
Ebara Research Co. Ltd.
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Toma Yasushi
Ebara Corporation, Fujisawa, Kanagawa 251-8502, Japan
著作論文
- Fast Atom Beam Etching of Glass Materials with Contact and Non-Contact Masks
- High-Efficiency Low Energy Neutral Beam Generation Using Negative Ions in Pulsed Plasma
- High-Efficiency Neutral-Beam Generation by Combination of Inductively Coupled Plasma and Parallel Plate DC Bias : Nuclear Science, Plasmas, Electric Dischanges