Electron Microscope Observation of Au/Si (111) Interface in Atomic Level
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概要
- 論文の詳細を見る
Au/Si (111) interfaces were investigated by a high resolution electron microscope in both "cross-sectional" and "flat-on" modes. The epitaxially grown Au (111) films of 10-20 nm thick on Si (111) show a mosaic structure of about 100 nm in diameter making small angle grain boundaries. By the flat-on observation, a fringe contrast of 0.28 nm spacing are observed in the boundary. The cross-sectional observations reveal that the interface is flat and the intermixing layers are formed along the surface in Si side. A long periodicity contrast anomaly was often observed in the intermixing layer images.
- 社団法人応用物理学会の論文
- 1986-03-20
著者
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HASHIMOTO Hatsujiro
Okayama University of Science
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Saito Norihito
Solid-state Laser For Astronomical Observation Research Team Riken
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Saito N
Solid-state Laser For Astronomical Observation Research Team Riken
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YOKOTA Yasuhiro
JEOL LTD.
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SAITO Noritsugu
Department of Applied Physics, Osaka University
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ENDOH Hisamitsu
Department of Applied Physics, Osaka University
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Saito Noritsugu
Department Of Applied Physics Osaka University
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Endoh Hisamitsu
Department Of Applied Physics Faculty Of Engineering Osaka University
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