Gettering Effects of B_2O_3 Encapsulant on Mg and Ca Impurities in LEC InP-Growth
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概要
- 論文の詳細を見る
Gettering effects have been investigated for doped Mg- and Ca-impurities in liquid encapsulated Czochralski (LEC)-grown InP single crystals. Impurity analyses were carried out for Mg- and Ca-doped InP starting materials, LEC -grown crystals and residual B_O_3 encapsulants. It was found that Mg and Ca could be removed as oxide from the melt due to a chemical reaction with a B_2O_3 encapsulant during growth.
- 社団法人応用物理学会の論文
- 1985-05-20
著者
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Katsui Akinori
Ntt Ibaraki Laboratories
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Katsui Akinori
Ntt Ibaraki Electrical Communication Laboratories Nippon Telegraph And Telephone Corporation
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KUBOTA Eishi
NTT Ibaraki Electrical Communication Laboratories, Nippon Telegraph and Telephone Corporation
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Kubota Eishi
Ntt Ibaraki Electrical Communication Laboratories Nippon Telegraph And Telephone Corporation
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