LEC Growth of High Purity InP Crystals by Pre-Encapsulation of Starting Material
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概要
- 論文の詳細を見る
InP crystals were grown by the liquid encapsulated Czochralski (LEC) technique, in which the starting materials in a pBN crucible were previously encapsulated with B_2O_3 using an outer vacuum vessel. The electrical properties throughout the LEC-grown InP crystals were improved by using the pre-encapsulated starting materials. This is due to the reduced incorporation into the crystals of impurities such as S and C, which are evaporated from carbon heater and radiation shield materials.
- 社団法人応用物理学会の論文
- 1986-03-20
著者
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Katsui Akinori
Ntt Ibaraki Laboratories
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Katsui Akinori
Ntt Ibaraki Electrical Communication Laboratories Nippon Telegraph And Telephone Corporation
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KUBOTA Eishi
NTT Ibaraki Electrical Communication Laboratories, Nippon Telegraph and Telephone Corporation
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Kubota Eishi
Ntt Ibaraki Laboratories
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Kubota Eishi
Ntt Ibaraki Electrical Communication Laboratories Nippon Telegraph And Telephone Corporation
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