A Defect Control Technique for the Intrinsic Gettering in Silicon Device Processing

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関連論文

Dependence of Warpage of Czochralski-Grown Silicon Wafers on Oxygen Concentration and Its Application to MOS Image-Sensor Device
A Defect Control Technique for the Intrinsic Gettering in Silicon Device Processing
Thermal Warping of Large Diameter Czochralski-Grown Silicon Wafers : Semiconductors and Semiconductor Devices
Formation of a Stacking Fault-Free Region in Thermally Oxidized Silicon

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