Modification of Surface Layers by Irradiation with a Long-Pulse Intense Ion Beam : Techniques, Instrumentations and Measurement

概要

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The effects of irradiation produced by long-pulse, intense ion beams on metal surfaces (Al, stainless steel and Ti) and silicon surfaces were investigated. These beams were comprised of proton or carbon ions with pulse widths of 〜300 ns, current densities of ≲1 kA/cm^2 and energies of 〜80 keV. The observed molten surface structures and recrystallized layers (20 μm depth) indicated that the surfaces reached high temperatures as a result of the irradiation. Changes in the X-ray diffraction patterns also indicated recrystallization by a rapid heating of the surfaces. Titanium carbide was produces by carbon-ion irradiation on a titanium surface; this process was verified by ESCA measurements.
社団法人応用物理学会の論文
1988-04-20