Development of an Innovative 5 μmφ Focused X-Ray Beam Energy-Dispersive Spectrometer and its Applications : Materials and Device Structures with Atomic Scale Resolution(<Special Section>Solid State Devices and Materials 1)

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概要

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• A 5.7 μmφ X-ray microbeam spectrometer has been developed. It incorporates an approximately parabolic inner-surface X-ray guide tube made of glass and a Li-diffused Si X-ray detector with a large area of 200 mm^2, developed to detect weak X-rays. An energy-dispersive spectrometer incorporating these components can simultaneously measure diffraction X-rays for observing local reactions and residual stresses, and fluorescent X-rays for analyzing least-amount-of-impurity elements in microregions during ULSI processing (≲900℃).

• 社団法人応用物理学会の論文
• 1988-11-20

著者

• HOSOKAWA Yoichiroh

  Department of Applied Physics, Osaka University

• YAMAMOTO Naoki

  Central Research Laboratory, Hitachi Ltd.

• Hosokawa Yoshinori

  Department Of Applied Physics Osaka University

• HOSOKAWA Yoshinori

  Central Research Laboratory, Hitachi, Ltd.

• Yamamoto Naoki

  Central Research Laboratory Hitachi Ltd.

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