Strain Analysis in Fine Al Interconnections by X-Ray Diffraction Spectrometry Using Micro X-Ray Beam

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1995-06-01

著者

• Yamamoto N

  Tokyo Inst. Technol. Tokyo Jpn

• Sakata S

  Corporate Research & Development Promotion Office Hitachi Ltd.

• Sakata Shinji

  Corporate Research & Development Promotion Office Hitachi Ltd.

• YAMAMOTO Naoki

  Central Research Laboratory, Hitachi Ltd.

• Yamamoto Naoki

  Central Research Laboratory Hitachi Ltd.

関連論文

• Strain Analysis in Fine Al Interconnections by X-Ray Diffraction Spectrometry Using Micro X-Ray Beam
• Applications of a Micro X-Ray Spectrometer and a Computer Simulator for Stress Analyses in Al Interconnections (SOLID STATE DEVICES AND MATERIALS 1)
• Microzone Recrystallization of InSb Thin Films for Hall Effect Magnetic Heads
• Development of an Innovative 5 μmφ Focused X-Ray Beam Energy-Dispersive Spectrometer and its Applications : Materials and Device Structures with Atomic Scale Resolution(Solid State Devices and Materials 1)

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