Conditions for the Formation of Ring-Like Distributed Stacking Faults in CZ-Si Wafers

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-03-15

著者

• Vanhellemont Jan

  Wacker Siltronic Ag

• KISSINGER Gudrun

  Institute for Semiconductor Physics

• LAMBERT Ulrich

  Wacker Siltronic AG

• GRAF Dieter

  Wacker Siltronic AG

• GRABOLLA Thomas

  Institute for Semiconductor Physics

• RICHTER Hans

  Institute for Semiconductor Physics

関連論文

• High Resolution Structure Imaging of Octahedral Void Defects in As-Grown Czochralski Silicon
• Conditions for the Formation of Ring-Like Distributed Stacking Faults in CZ-Si Wafers
• Observation of Extremely Low Defect Densities in Silicon Wafers

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