Observation of Extremely Low Defect Densities in Silicon Wafers

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-04-15

著者

• Graef D

  Wacker Siltronic Ag

• Kirchner Ralf

  Wacker Siltronic Ag

• SCHMOLKE Rudiger

  Wacker Siltronic AG

• GRAF Dieter

  Wacker Siltronic AG

• SCHAUER Reinhard

  Wacker Siltronic AG

• WERNER Norbert

  Wacker Siltronic AG

• MAYER Erwin-Peter

  Wacker Siltronic AG

• WAGNER Peter

  Wacker Siltronic AG

• Schmolke R

  Wacker Siltronic Ag

関連論文

• High Resolution Structure Imaging of Octahedral Void Defects in As-Grown Czochralski Silicon
• Conditions for the Formation of Ring-Like Distributed Stacking Faults in CZ-Si Wafers
• Observation of Extremely Low Defect Densities in Silicon Wafers
• Morphology Change of Artificial Crystal Originated Particles, and the Effect on Gate Oxide Integrity
• Fabrication and Characterization of Artificial Crystal Originated Particles

スポンサーリンク