Preparation of Tl_2Ca_2Ba_2Cu_3O_x Superconducting Thin Films by DC Sputtering

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概要

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• Thin films of the Tl-Ca-Ba-Cu-O system were prepared by a single-target dc sputtering system on YSZ substrates with postannealing. The effects of various annealing conditions on the films were studied. It was found that under suitable conditions, the Tl_2Ca_2Ba_2Cu_3O_x thin films with a zero-resistance temperature of up to 97 K could be formed by sputtering from a target of the same composition. The X-ray diffraction patterns showed that the annealed films were preferentially c-axis oriented perpendicular to the substrates. It was also found that the films were highly resistant to n-butyl acetate, acetone and water.

• 社団法人応用物理学会の論文
• 1989-04-20

著者

• Wang C.

  Institute of Physics, Academia Sinica

• GOU Yih

  Institute of Electrophysics, National Chiao-Tung University

• Wang C

  Department Of Electrical And Electronic Engineering Kanazawa University

• Gou Y

  Institute Of Electrophysics National Chiao-tung University

• GOU Y.

  Institute of Electrophysics, National Chiao-Tung University

• Uen T.

  Department Of Electrophysics National Chaio Tung University

• CHANG H.

  Institute of Electro-optical Engineering, National Chiao Tung University

• CHU M.

  Institute of Electro-optical Engineering, National Chiao Tung University

• GOU Y.

  Department of Electrophysics, National Chiao Tung University

• Wang C.

  Institute Of Physics Academia Sinica

• Chu M.

  Institute Of Electro-optical Engineering National Chiao Tung University

• Chang H.

  Institute Of Electro-optical Engineering National Chiao Tung University

• WANG C.

  Institute of Nuclear Science, National Tsing Hua University

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