NdBa_2Cu_3Ox-Au-NdBa_2Cu_3Ox Proximity-Effect Junction with a Decanano-Scale Trench Fabricated Using a High-resolution Focused Ion Beam Technique
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概要
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We have fabricated NdBa_2Cu_3Ox-Au-NdBa_2Cu_3Ox proximity-effect junctions using a high-resolution focused gallium-ion beam (FIB) technique with a full width of half maximum of 10 nm. These bridge-type junctions have characteristics such as a decanano-scale trench for the bridge formed using the etching function of FIB, and a precise contact area defined using the deposition function of FIB. The current-voltage characteristics of the junctions are qualitatively consistent with a resistively shunted junction model.
- 社団法人応用物理学会の論文
- 1997-12-15
著者
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Enomoto Youichi
Superconductivity Research Laboratory International Superconductivity Technology Center
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Morohashi Shinichi
Superconductivity Research Laboratory International Superconductivity Technology Center
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Morohashi Shin′ichi
Superconductivity Research Laboratory, International Superconductivity Technology Center,
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