Fabrication of Finely Controlled Micro Groove by Focused Ion Beam for High-T_c Superconducting Josephson Junctions
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概要
- 論文の詳細を見る
For Josephson junctions using a narrow groove on a substrate etched by a focused ion beam (FIB), it is important to control the shape of the groove. We have developed the FIB milling method which has flexibility to produce a variety of groove shapes. The groove shapes are finely controlled by changing the etching time at each line of beam scan under computer control. V-shape grooves with different widths between 205 nm and 650 nm have been formed with the same slope angle on an MgO substrate. A Josephson junction fabricated on this groove shows RSJ-type I-V curves for a 300 nm thick c-axis oriented YBa_2Cu_3O_7(YBCO) film. The top surface profile of the YBCO film has the same V-shape as the groove on the substrate.
- 社団法人応用物理学会の論文
- 1999-03-15
著者
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SUZUKI Katsumi
Superconductivity Research Laboratory,ISTEC
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Enomoto Youichi
Superconductivity Research Laboratory International Superconductivity Technology Center
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Enomoto Youichi
Superconductivity Research Laboratory Istec
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Yutani N
Superconductivity Research Laboratory Istec:(present Address)advanced Technology R&d Center Mits
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YUTANI Naoki
Superconductivity Research Laboratory, ISTEC
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ENOMOTO Youichi
Superconductivity Research Laboratory, ISTEC
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