Crystallization of Boric Acid on Low-K Glass+Ceramic Green Tapes
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概要
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Crystallization at room temperature on the surface of low-k glass+ceramic green tapes, containing a low-softening-point borosilicate glass and a high-softening-point high silica glass has been investigated. Results of diffuse reflectance Fourier transform infrared (FTIR) and Raman microprobe spectra show that the crystals are boric acid, formed by reaction of the boric oxide in the borosilicate glass with water in an ambient atmosphere. A faster and greater degree of crystallization is observed with increased level of relative humidity in the ambient atmosphere. To minimize the formation of boric acid crystals on the green tapes, a relative humidity of 15% or less is required.
- 社団法人応用物理学会の論文
- 1996-04-01
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