Compositional Design and Properties of a Low-k Silica Dielectric for Multilayer Ceramic Substrate
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概要
- 論文の詳細を見る
Compositional design and properties of a low-dielectric-constant silica composite containing borosilicate glass, high-silica glass and gallium oxide are described. A cristobalite-free silica dielectric with a high sintered density, >95% , is obtained at temperatures less than 1000℃. An analytical approach assuming the mixing rule is used to design compositions with desirable properties, and validated by experimental results. Compositions with a thermal expansion coefficient compatible with Si and GaAs, and dielectric constants in the ranges of 4-5 and 5-6, respectively, at 1 MHz, are developed.
- 社団法人応用物理学会の論文
- 1995-04-15
著者
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Kuan Tong-hua
Department Of Materials Science And Engineering National Tsing Hua University
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Jean Jau-ho
Department Of Materials Science And Engineering National Tsing Hua University
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