Novel Microcantilever for Scanning Thermal Imaging Microscopy

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概要

• 論文の詳細を見る

• A novel microcantilever structure for the probe of a scanning thermal imager (STI-probe) which has an integrated pyramidal thin-film microthermocouple is proposed. Using a micromachining process, free-standing microcantilevers having length from 180 μm to 880 μm are fabricated. The STI-probe has an output voltage of 8.43 μV for a unit temperature and a linear thermoelectromotive force for increasing temperature. This probe will be very useful for precise scanning thermal imaging technology.

• 社団法人応用物理学会の論文
• 1996-03-01

著者

• Suzuki Yoshihiko

  Central Research Laboratory Nikon Corporation

関連論文

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• Flexible Microgripper
• Fabrication and Evaluation of Flexible Microgripper
• Novel Microcantilever for Scanning Thermal Imaging Microscopy
• Underwater Performance of Flexible Microgripper and Fine Particle Manipulation

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