Fabrication and Evaluation of Flexible Microgripper

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概要

• 論文の詳細を見る

• A new concept of a microgripper using Lorentz force actuation and electrothermal bimorph actuation is presented here. Design, theoretical consideration, fabrication process and characterization results are presented. Many free-standing fingers, ranging from 200 μm to 1000 μm in length, have been fabricated successfully by the micromachining process. We have observed the low driving voltage performance and the flexible finger motion of the flexible microgripper (FMG) under the microscope. A 210 μm deflection of a 1000-μm-long finger was obtained at the input voltage of 1 V.

• 社団法人応用物理学会の論文
• 1994-04-15

著者

• Suzuki Yoshihiko

  Central Research Laboratory Nikon Corporation

関連論文

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