Underwater Performance of Flexible Microgripper and Fine Particle Manipulation

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概要

• 論文の詳細を見る

• Underwater performance of the microfabricated flexible microgripper (FMG) using Lorentz force actuation and electrothermal bimorph actuation is presented here. The Lorentz force actuation was a primary factor of the actuation for the underwater operation of FMG. We have manipulated the polystyrene fine particles successfully by using the FMG in water.

• 社団法人応用物理学会の論文
• 1994-10-15

著者

• Suzuki Yoshihiko

  Central Research Laboratory Nikon Corporation

関連論文

• SiO_2/Si System Studied by Scanning Capacitance Microscopy
• Flexible Microgripper
• Fabrication and Evaluation of Flexible Microgripper
• Novel Microcantilever for Scanning Thermal Imaging Microscopy
• Underwater Performance of Flexible Microgripper and Fine Particle Manipulation

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