Determination of Evaporation Rate and Vapor Pressure of Organic Monomers Used for Vapor Deposition Polymerization
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概要
- 論文の詳細を見る
Thermogravimetry (TG) and the Langmuir equation have been employed for the determination of the temperature dependence of the evaporation rate and saturated pressure of monomers used in vapor deposition polymerization (VDP). The measuring process utilizes the evaporation of monomers in vacuum. The ranges of the evaporation rate and saturated pressure of monomers as determined by the TG technique are from 10^<-2> to 10^<-5> mol/m^2・s and from 1 to 10^<-3> Pa, respectively. Comparisorn of the evaporation rate vs temperature relation and the melting point of monomers determines whether the evaporation involves sublimation from a solid surface or evaporation from a liquid surface.
- 社団法人応用物理学会の論文
- 1993-06-15
著者
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TAKAHASHI Yoshikazu
Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd.
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Tsukahara Sonoko
Tsukuba Institute For Super Materials Ulvac Japan Ltd.
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Maesono Akikazu
Sinku-riko Inc.
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Iijima Masayuki
Tsukuba Institute For Super Materials Ulvac Japan Ltd.
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MATSUZAKI Kanenori
Tsukuba Institute for Super Materials, ULVAC Japan Ltd.
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FUKADA Eiicchi
Tsukuba Institute for Super Materials, ULVAC Japan Ltd.
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MURAKAMI Yukimasa
SINKU-RIKO, Inc.
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Takahashi Yoshikazu
Tsukuba Institute For Super Materials Ulvac Japan Ltd.
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Fukada Eiicchi
Tsukuba Institute For Super Materials Ulvac Japan Ltd.
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Tsukahara Sonoko
Tsukuba Institute For Super Materials Ulvac Japan Ltd
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Murakami Yukimasa
Sinku-riko Inc.
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Matsuzaki Kanenori
Tsukuba Institute For Super Materials Ulvac Japan Ltd.
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- Summary Abstract