Chemically Polished Aluminum Alloys with Low Outgassing Rate

概要

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A technique of chemical polishing and subsequent cleaning was developed as the final surface treatment of most of aluminum alloys those are used as component materials in ultrahigh and extremely high vacuum equipments. This paper focuses to most recurrently used alloys, A5052 and A6061. Surfaces treated by the new technique are smooth enough to give a clear reflection. The outgassing properties by thermal desorption spectroscopy, pump-down characteristics, and surface analyses by Auger electron spectroscopy, atomic force microscopy, Brunauer-Emmett-Teller method, and humidity cabinet test were examined on the chemically polished samples. The outgassing rate of the chemically polished samples is in the lowest range of value to those reported for mechanically machined aluminum alloys. The atmospheric corrosion resistance of chemically polished samples is better than that of any mechanically machined samples, and the specially treated chemically polished samples has higher corrosion resistance than the electrolytically polished samples.
日本真空協会の論文
1998-06-20