X-Ray Evaluation of Microroughness of Mechanochemically Polished Silicon Surfaces
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-04-15
著者
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Sakata O
Tokyo Inst. Technol. Yokohama Jpn
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Sakata Osami
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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HASHIZUME Hiroo
Research and Education Center for Materials Science, Nara Institute of Science and Technology
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Nikulin Andrei
Research Laboratory Of Engineering Materials Tokyo Institute Of Technology
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Hashizume Hiroo
Research And Education Center For Materials Science Nara Institute Of Science And Technology
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Sakata Osami
Research and Utilization Division, Japan Synchrotron Radiation Research Institute (JASRI)/SPring-8, Sayo, Hyogo 679-5198, Japan
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