NMR Study of Compositional Inhomogeneities in Sputtered Co-Cr Films
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概要
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The development of compositional inhomogeneities in sputtered Co-22 at.% Cr films is studied as a function of substrate temperature using the spin-echo ^<59>Co-NMR technique. It is observed that a highly Co-rich component grows as the substrate temperature increases from 30℃ to 400℃. The Cr content of the Co-rich part in the film deposited at 400℃ is estimated to be as low as 5-7 at.%. The results are consistent with the appeararce of a clearly striped compostional microstructure which suggests compositional separation.
- 社団法人応用物理学会の論文
- 1991-06-15
著者
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MAEDA Yasushi
NTT Basic Research Laboratories
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TAKEI Koji
NTT Basic Research Laboratories
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Takei Koji
Ntt Basic Research Laboratries
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Maeda Yasushi
Ntt Basic Research Laboratries
関連論文
- Microstructural Analysis of CoCr Thin Films by Small-Angle Neutron Scattering
- Bias Effect on Compositional Separation in Sputtered Co-Cr Films
- NMR Study of Magnetic and Compositional Inhomogeneities in Co-Cr Thin Films
- NMR Study on Compositional Inhomogeneity in Electroless-Deposited CoNiP Films for Perpendicular Magnetic Recording
- Micromagnetic Domain Observations of Co-Cr-Ta Films Using Neutron Scattering
- Point Magnetic Recording Using a Force Microscope Tip on Co-Cr Perpendicular Media with Compositionally Separated Microstructures
- Selective Dry Etching to Reveal Compositional Imhomogeneity in Co-Cr Magnetic Films
- NMR Study of Compositional Inhomogeneities in Sputtered Co-Cr Films
- The Effect of Ejection Angle in Ion-Beam Sputter Deposition of Superconducting Amorphous Beryllium Film
- NMR Study on Compositional Distribution in Sputter-Deposited Co-Ni Thin Films
- Detection of Compositional Separation in Co-Ru Alloy Magnetic Films
- Thermodynamics in Co-Cr Mangetic Alloy Thin Films
- Selective Chemical Etching of Latent Compositional Microstructures in Sputtered Co-Cr Films
- Direct Observation of the Segregated Microstructures within Co-Cr Film Grains