Surface Profiling Using the Photothermal Displacement Method
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概要
- 論文の詳細を見る
This paper describes a surface profile measurement by the photothermal displacement method. This technique is based on the thermal expansion of a sample absorbing a pumping beam and on the change in the deflection of a reflected probe beam due to the slope of displacement. A vertical resolution of about 0.1 μm is experimentally obtained. The surface profile measurement of a Mn-Zn ferrite magnetic head is demonstrated.
- 社団法人応用物理学会の論文
- 1990-07-20
著者
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Umeda Norihiro
Department Of Industrial Mechanical Engineering Faculty Of Technology Tokyo University Of Agricultur
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Itoh Ken-ichi
Department Of Mechanical Systems Engineering Faculty Of Technology Tokyo University Of Agriculture A
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Itoh Ken-ichi
Department Of Electrical And Computer Engineering Faculty Of Technology Kanazawa University
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Umeda Norihiro
Department Of Mechanical Systems Engineering Faculty Of Technology Tokyo University Of Agriculture A
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