Preparation of As-Deposited Yb-Ba-Cu-O Superconducting Films by DC Arc Discharge Evaporation Method
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概要
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A new process using DC arc discharge evaporation is presented for preparing as-deposited superconducting Yb-Ba-Cu-O films on insulating substrates. In this method, it is necessary to alternate the applied bias direction periodically during film deposition in order to obtain stoichiometric composition films. It was found from SIMS analysis that the periodic change of the composition did not diffuse out in the film even after annealing at 800℃ for 2 h. Thus, the alternation period was shortened to about 1 nm. The resultant film deposited on SrTiO_3(100) at 700℃ showed zero resistivity at 75 K.
- 社団法人応用物理学会の論文
- 1990-12-20
著者
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Nohira Hiroshi
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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ISHIWARA Hiroshi
Research Laboratory of Precision Machinery and Electronics, Tokyo Institute of Technology
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Ishiwara Hiroshi
Research Laboratory Of Precision Machinery And Electronics Tokyo Institute Of Technology
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