Ion Energy Distribution of KrF Laser Ablation

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概要

• 論文の詳細を見る

• The KrF laser ablation of Al, Cu, Si, and SrTiO_3 targets has been studied using an electrostatic deflection energy analyzer and a quadrupole mass filter. Beam like ions appear to accompany ablation. The average kinetic energies of Si^+ and metal ions are about 45 eV and 60 eV, respectively. The energies of ions are ranked in the order of Si<metal (Al, Cu)<SrTiO_3. The mean ion energy of Cu^+ is not affected by the laser fluence range of 2-7.5 J/cm^2.

• 社団法人応用物理学会の論文
• 1992-04-15

著者

• Nishikawa Yukio

  Production Core Engineering Laboratory Matsushita Electric Industrial Co. Ltd.

• Nishikawa Yukio

  Production Engineering Laboratories Matsushita Electric Industrial Co. Ltd.

• Tanaka Kunio

  Production Engineering Laboratories Matsushita Electric Industrial Co. Ltd.

• Yoshida Yoshikazu

  Production Engineering Laboratories Matsushita Electric Industrial Co. Ltd.

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• Low-Energy Double-Ion -Beam Deposition System
• PIG-Type Compact Microwave Metal Ion Source
• Ion Energy Distribution of KrF Laser Ablation
• Property of a Microwave Magnetron Plasma Source Inside a Coaxial Line

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