Property of a Microwave Magnetron Plasma Source Inside a Coaxial Line

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概要

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• A microwave magnetron plasma source which excited the plasma inside the open-end of a coaxial line is described. Experiments are carried out to measure plasma parameters and external circuit elements. The coupling of the plasma and microwave is analyzed for the magnitude of the reflection coefficient. It was found that the self-bias between plasma and inner conductor of coaxial line is dependent on the reactance of the external circuit elements.

• 社団法人応用物理学会の論文
• 1992-05-15

著者

• Yoshida Yoshikazu

  Production Engineering Laboratories Matsushita Electric Industrial Co. Ltd.

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• Property of a Microwave Magnetron Plasma Source Inside a Coaxial Line

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