Low Dielectric Constant Amorphous SiBN Ternary Films Prepared by Plasma-Enhanced Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1987-05-20

著者

• Maeda Masahiko

  Ntt Electrical Communications Laboratories

• Maeda Masahiko

  Ntt Electrical Communications Laboratories Tokai-mura

• MAKINO Takahiro

  NTT Electrical Communications Laboratories

• Makino Takahiro

  Ntt Electrical Communications Laboratories Morinosato

関連論文

• Bonds and Defects in Plasma-Deposited Silicon Nitride Using SiH_4-NH_3-Ar Mixture
• Low Dielectric Constant Amorphous SiBN Ternary Films Prepared by Plasma-Enhanced Deposition
• Determination of Hydrogen Concentration in PCVD Silicon Nitride Films by Elastic Recoil Detection Analysis

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