Maeda Masahiko | Ntt Electrical Communications Laboratories
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概要
関連著者
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Maeda Masahiko
Ntt Electrical Communications Laboratories
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MAKINO Takahiro
NTT Electrical Communications Laboratories
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SAKAKIBARA Yutaka
NTT Electrical Communications Laboratories, Nippon Telegraph and Telephone Corporation
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Maeda Masahiko
Ntt Electrical Communications Laboratories Tokai-mura
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TAKAHASHI Mitsutoshi
NTT Electrical Communication Laboratories
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Takahashi Mitsutoshi
Ntt Electrical Communications Laboratories
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Sakakibara Yutaka
Ntt Electrical Communications Laboratories
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Sakakibara Yutaka
Ntt Electrical Communication Laboratories
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Makino Takahiro
Ntt Electrical Communications Laboratories Morinosato
著作論文
- Bonds and Defects in Plasma-Deposited Silicon Nitride Using SiH_4-NH_3-Ar Mixture
- Low Dielectric Constant Amorphous SiBN Ternary Films Prepared by Plasma-Enhanced Deposition
- Determination of Hydrogen Concentration in PCVD Silicon Nitride Films by Elastic Recoil Detection Analysis