H_2-Enhanced Epitaxial Regrowth of Polycrystalline Silicon through Natural Oxide Layers on Silicon Substrates

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概要

• 論文の詳細を見る
• 1985-05-20

著者

• Kugimiya Koichi

  Central Research Laboratory Matsushita Electric Ind. Co. Ltd.

• Kugimiya Koichi

  Central Research Lab. Matsushita Electric Industrial Co. Ltd.

• Hirofuji Yuichi

  Central Research Laboratory Matsushita Electric Ind. Co. Ltd.

関連論文

• Preparation and Properties of Lead Zirconate-Titanate Thin Films : Thin Films
• H_2-Enhanced Epitaxial Regrowth of Polycrystalline Silicon through Natural Oxide Layers on Silicon Substrates
• UV Laser Irradiation Effects on Frequemcy of Surface Acoustic Wave (SAW) Filters Coated with Titamium Oxide Films
• Piezoelectric Properties of Nanostructure-Controlled Lead-Perovskite-Based Ceramics ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• CW Laser Annealing of Polycrystalline Silicon on SiO_2 and Effects of Successive Furnace Annealing
• Si-Beam Radiation Cleaning in Molecular-Beam Epitaxy
• A New Interferometric Alignment Technique with Holographie Configuration

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