A New Interferometric Alignment Technique with Holographie Configuration

概要

論文の詳細を見る
A new interferometric alignment technique using a holographic configuration with a precision of the order of tens of nm has been developed for registering a grating on a substrate to an interference fringe of two conjugate beams in a space. The alignment between a grating and a fringe was determined from the moire image generated by the beams diffracted from the grating, and a theoretical analysis was performed to calculate the intensity of the moire image. The experimental results were in good agreement with the calculations. The application of the method to a wafer stepper with submicron resolution is proposed.
社団法人応用物理学会の論文
1985-11-20