A Monte Carlo Simulation of the Evacuation Process in the Molecular Flow Regime : Techniques, Instrumentations and Measurement

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概要

• 論文の詳細を見る

• The evacuation process in an ultrahigh vacuum chamber is elucidated by Monte Carlo calculation. Using chambers of different geometries, molecules were injected into the vacuum for a finite period of time and the resulting change in the number of molecules remaining in the chamber was analyzed. It was postulated that the molecules are reflected at the inner walls of the chamber in accordance with the cosine and specular reflection laws. The results show that the effective pumping speed depends on the shape of the chamber, but the ultimate pressure has little dependence on it.

• 社団法人応用物理学会の論文
• 1988-06-20

著者

• Kimata M

  Waseda Univ. Tokyo

• Kimata Morihiko

  Electrical Engineering Department Waseda University

• VILLAFLOR Antonio

  Electrical Engineering Department, Waseda University

• Villaflor Antonio

  Electrical Engineering Department Waseda University

• Kawahara Minoru

  Electrical Engineering Department Waseda University

• IIYORI Hideo

  Electrical Engineering Department, Waseda University

• Iiyori Hideo

  Electrical Engineering Department Waseda University

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• A Monte Carlo Simulation of the Evacuation Process in the Molecular Flow Regime : Techniques, Instrumentations and Measurement

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