Computational Studies on the Erosion Process in a Magnetron Sputtering System with a Ferromagnetic Target
スポンサーリンク
概要
- 論文の詳細を見る
The erosion process is studied using computational simulations for a magnetron sputtering system with a ferromagnetic target. The magnetic field analysis is carried out with a finite element method (FEM) code. Plasma generation and erosion are examined via the particle orbit simulations. A new model is developed to examine the erosion process in a ferromagnetic target. It is shown that the erosion profile obtained in computational studies is in good agreement with experimental results.
- 社団法人応用物理学会の論文
- 1998-03-15
著者
-
Suzuki Takeshi
Faculty of Agriculture, Kobe University
-
Ido Shunji
Faculty Of Engineering Saitama University
-
KASHIWAGI Mieko
Faculty of Engineering, Saitama University
-
Kashiwagi Mieko
Faculty Of Engineering Saitama University
-
Suzuki Takeshi
Faculty Of Engineering Saitama University
関連論文
- Effect of Fe, Mn or Al Compounds on Humification of Three Types of Plant Residues during Thermal Incubation (Soil Chemistry and Mineralogy)
- Humification of Three Plant Residues with Sakurajima Volcanic Ash as Influenced by Phosphate Addition and Low pH Condition
- New Aspects for the Treatment of Cardiac Diseases Based on the Diversity of Functional Controls on Cardiac Muscles : Novel Approaches for the Diagnosis and Treatment of Cardiac Diseases
- Magnetic Field Analyses by Using Free Mesh Method and Their Visualization
- Inhibition of Septation in Bacillus subtilis by a Peptide Antibiotic, Edeine B1
- New Aspects for the Treatment of Cardiac Diseases Based on the Diversity of Functional Controls on Cardiac Muscles : Acute Effects of Female Hormones on Cardiac Ion Channels and Cardiac Repolarization
- Novel Etiological and Therapeutic Strategies for Neurodiseases : Preface
- Cryogenic Neutron Calorimeter II. Deposited Energy and Temperature Increase due to DD Neutrons
- An Efficient Timing-Driven Global Routing Method for Standard Cell Layout (Special Issue on Synthesis and Verification of Hardware Design)
- Computational Studies on the Erosion Process in a Magnetron Sputtering System with a Ferromagnetic Target
- Computational Studies on Lifetime of Primary Electrons in a Bucket-Type Ion Source with Grid Current
- Computational Studies of Plasma Generation and Control in a Magnetron Sputtering System
- Measurements of Plasma Controlled by Compressed Magnetic Field Magnetron Sputtering Technique
- Tin(II) Trifluoromethanesulfonate-Caralyzed Highly Selective Synthesis of 2-Substituted 4-Methylenetetrahydropyrans from Trimethyl{2-[2-(trimethylsiloxy)ethyl]allyl}silane and Acetals
- A Novel and Efficient Method for the Synthesis of Tetrahydropyranyl Ethers Catalyzed by Sc(OTf)_3
- Humification of Three Plant Residues with Sakurajima Volcanic Ash as Influenced by Phosphate Addition and Low pH Condition
- Novel Etiological and Therapeutic Strategies for Neurodiseases: Preface