Computational Studies of Plasma Generation and Control in a Magnetron Sputtering System

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概要

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• The problems in plasma generation and erosion profiles are studied by tracing an electron in a cylindrical magnetron sputtering system with a ferromagnetic target. The magnetic field is analyzed using the finite-element method (FEM). The magnetic fields in the basic reference model are generated by a permanent magnet in the center and a yoke of soft iron around the central permanent magnet. First, the yoke is moved to change the erosion profiles. Second, the permanent magnet replaces the yoke. In both systems, the erosion profiles and the configuration of the magnetic field are examined when the yoke and the magnet in the outer are moved.

• 社団法人応用物理学会の論文
• 1999-07-30

著者

• Ido Shunji

  Faculty Of Engineering Saitama University

• TAKAHASHI Mikihiko

  Faculty of Engineering, Saitama University

• KASHIWAGI Mieko

  Faculty of Engineering, Saitama University

• Kashiwagi Mieko

  Faculty Of Engineering Saitama University

• Takahashi Mikihiko

  Faculty Of Engineering Saitama University

• Kashiwagi Meiko

  Faculty of Engineering, Saitama University

関連論文

• Magnetic Field Analyses by Using Free Mesh Method and Their Visualization
• Cryogenic Neutron Calorimeter II. Deposited Energy and Temperature Increase due to DD Neutrons
• Computational Studies on the Erosion Process in a Magnetron Sputtering System with a Ferromagnetic Target
• Computational Studies on Lifetime of Primary Electrons in a Bucket-Type Ion Source with Grid Current
• Computational Studies of Plasma Generation and Control in a Magnetron Sputtering System
• Measurements of Plasma Controlled by Compressed Magnetic Field Magnetron Sputtering Technique

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