Computational Studies on Lifetime of Primary Electrons in a Bucket-Type Ion Source with Grid Current

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概要

• 論文の詳細を見る

• We developed a calculation code to trace electron orbits with collisions between electrons and argon gas atoms in a bucket-type ion source with grid current. By supplying grid current, the lifetime of a primary electron was extended and the number of electrons that escape from the plasma grid was reduced. This paper discusses the relationship between grid current and lifetime of primary electrons.

• 社団法人応用物理学会の論文
• 1994-03-01

著者

• Ido Shunji

  Faculty Of Engineering Saitama University

• HASEBE Hiroki

  Faculty of Engineering, Saitama Universit

• Hasebe Hiroki

  Faculty Of Engineering Saitama Universit

• IDO Shunji

  Faculty of Engineering, Saitama University

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• Computational Studies on Lifetime of Primary Electrons in a Bucket-Type Ion Source with Grid Current
• Computational Studies of Plasma Generation and Control in a Magnetron Sputtering System
• Measurements of Plasma Controlled by Compressed Magnetic Field Magnetron Sputtering Technique

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