Selected-area Deposition of Diamond Films on Silicon Nitride-coated Silicon Substrates Using Negatively Biased Microwave Plasma Enhanced Chemical Vapor Deposition Technique
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-11-15
著者
-
Hu C‐t
Department Of Materials Science And Engineering National Tsing-hua University
-
Lin I-nan
Materials Science Center National Tsing Hua University
-
Hu C‐t
National Tsing‐hua Univ. Hsin‐chu Twn
-
CHEN Yung-Hsin
Department of Materials Science and Engineering, National Tsing-Hua University
-
HU Chen-Ti
Department of Materials Science and Engineering, National Tsing-Hua University
-
Hu Chen-ti
Department Of Material Science Engineering National Tsing Hua Universtiy
-
Lin I-nan
Material Science Center National Tsing-hua University
-
Chen Yung-hsin
Department Of Materials Science And Engineering National Tsing-hua University
-
LIN I-Nan
Materials Science Center, National Tsing-Hua University
関連論文
- Structure and Dielectric Properties of SrTiO_3 Films Prepared by Pulsed Laser Deposition Technique
- Characteristics of BaTiO_3 Films Prepared by Pulsed Laser Deposition
- Selected-area Deposition of Diamond Films on Silicon Nitride-coated Silicon Substrates Using Negatively Biased Microwave Plasma Enhanced Chemical Vapor Deposition Technique
- Influence of Buffer Materials on the Pyroelectric Properties of (Pb_La_)TiO_3 Thin Films
- Interdiffusion in (Pb_La_x)(Zr_xTi_)_O_3/SrRuO_3> Multilayer Thin Films Examined by Secondary Ions Mass Spectroscopy
- Crystallization Characteristics of LaNiO_3 Layers and Their Effect on Pulsed Laser Deposited (Pb_La_x)(Zr_yTi_)O_3 Thin Films
- Microstructures and Electrical Properties of V_2O_5-based Multicomponent ZnO Varistors Prepared by Microwave Sintering Process
- Electrical Properties of ZnO Varistors Prepared by Microwave Sintering Process
- Growth of Epitaxial-Like (Sr_Ba_)Nb_2O_6 Ferroelectric Films
- Electron Field Emission Characteristics of Planar Field Emission Array with Diamondlike Carbon Electron Emitters
- Electron Emission Characteristics of Diamond-like Films Synthesized by Pulsed Laser Deposition Technique
- Electron Emission Characteristics of Diamond-like Films Synthesized by Pulsed Laser Deposition Technique
- Microscopic Examination of the Microwave Sintered (Pb_Sr_)TiO_3 Positive-Temperature-Coefficient Resistor Materials
- Growth Behavior of Y_1Ba_2Cu_3O_ Superconducting Thin Films Using Laser Ablation Technique
- Terahertz Response of Bulk Ba(Mg_Ta_)O_3
- Effect of Ba_5Ta_4gO_ Incorporation on Sintering Behavior and Microwave Dielectric Properties of Ba(Ma_Ta_)O_3 Materials
- Effect of SiO_2 Sintering Aids on High Critical Temperature Positive Temperature Coefficient of Resistivity Properties of (Pb_Sr_Ba_)TiO_3 Materials Prepared by Microwave Sintering Technique
- Electrical Properties of Microwave-Sintered (Sr_Pb_)TiO_3 Ceramics
- Dielectric Properties of xBa(Mg_Ta_)O_3-(1 - x )Ba(Mg_Nb_) O_3 Complex Perovskite Ceramics
- Low-Temperature Deposition of Pb(Zr, Ti)O_3 Thin Films on Si Substrates Using Ba(Ng_Ta_)O_3 as Buffer Layer
- Properties of Ba(Mg_Ta_)O_3 Thin Films Prepared by Pulsed-Laser Deposition
- Modeling on the Resistivity-Temperature Properties of (Pb_Sr_)TiO_3 Materials Prepared by the Rapid Thermal Sintering Process
- Influence of Pt, RuO_2 and SrRuO_3 Intermediate Layers on Characteristics of (Sr_Ba_)Nb_2O_6 Thin Films
- Electrical Properties of Microwave-Sintered ZnO Varistors
- Transmission Electron Microscopic Microstructure of Base-Metal-Electroded BaTiO_3 Capacitor Materials with Duplex Structures
- Transmission Electron Microscopic Microstructure of Base-Metal-Electroded BaTiO3 Capacitor Materials with Duplex Structures
- Properties of Ba(Mg1/3Ta2/3)O3 Thin Films Prepared by Pulsed-Laser Deposition
- Low-Temperature Deposition of Pb(Zr,Ti)O3 Thin Films on Si Substrates Using Ba(Mg1/3Ta2/3)O3 as Buffer Layer
- Microscopic Examination of the Microwave Sintered (Pb0.6Sr0.4)TiO3 Positive-Temperature-Coefficient Resistor Materials
- Dielectric Properties of $x$Ba(Mg1/3Ta2/3)O3–($1-x$)Ba(Mg1/3Nb2/3)O3 Complex Perovskite Ceramics
- Electrical Properties of ZnO Varistors Prepared by Microwave Sintering Process
- Electrical Properties of Microwave-Sintered (Sr0.4Pb0.6)TiO3 Ceramics
- Crystallization Characteristics of LaNiO3 Layers and Their Effect on Pulsed Laser Deposited (Pb 1-xLax)(ZryTi 1-y)O 3 Thin Films