Computer Studies of Depth Profiles due to Carbon Fullerene Impacts on a TiD_2 Target
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概要
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We studied the depth profile due to carbon fullerene impacts on a TiD2 target, using the time-evolution Monte Carlo code DYACAT. Simulations have been performed for incident energies per atom of 100 eV-5 keV, and for the clusters (C)_N (N=30-240) and a monatomic ion. In the case of the lower energy cluster bombardment, the projected range of carbon fullerenes is larger than that of monatomic ions, because the cluster atoms in the lower part of the cluster clear the way for the subsequent cluster atoms. In the higher cluster energy region, the projected range is smaller than that of monatomic ions, because the initial velocity of the cluster atoms is randomized due to collisions of a cluster atom with a cluster atom or a moving target atom. The cluster effect of the projected range is determined by the competition process of the clearing-the-way effect and the cluster-enhanced randomization effect.
- 社団法人応用物理学会の論文
- 1997-10-15
著者
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Yamamura Yasunori
Department Of Applied Physics Faculty Of Science Okayama University Of Science
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Muramoto Tetsuya
Department Of Applied Physics Faculty Of Science Okayama University Of Science
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