Optimization of Object-Image Distance for Aberration and Space-Charge Effect in Symmetric Magnetic Doublet with Dynamically Compensated Field Aberrations

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概要

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• Maximum beam currents are expected when the optimum object-image distances and beam semiangle are 840mm and 0.53 mrad, 840 mm and 0.27 mrad, and 1008 mm and 0.16 mrad for the subfield sizes of 250, 500, and 1000μm squares, respectively, where main field size, beam energy, energy width, and beam blur specifications are assumed to be 20 mm, 100 keV, 3 eV, and 45 nm, respectively, and the space-charge effect is assumed to be proportional to the object-image distance, beam current and (beam semiangle)^<-1>. The residual distortions after correction of the beam rotation and position are 5.2, 7.6, and 6.6 nm for the above respective object-image distance and field size conditions.

• 社団法人応用物理学会の論文
• 1995-07-15

著者

• SHIMIZU Hiroyasu

  2nd Development Department, IC Equipment Division, Nikon Corporation

• Nakasuji Mamoru

  2nd Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation

• Shimizu Hiroyasu

  2nd Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation

関連論文

• Electron Optics Properties of Electron Beam Stepper
• Symmetric Magnetic Doublet Optics with Dynamically Compensated Field Aberration for Reducing Image Projection System
• Optimization of Object-Image Distance for Aberration and Space-Charge Effect in Symmetric Magnetic Doublet with Dynamically Compensated Field Aberrations
• Secondary Electron Detection Efficiency for Magnetic Lenses with a Retarding Electrostatic Field
• Electron Optics Properties of Electron Beam Stepper

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